Sensonit Microfluidics Prototyping Technology

The Sensonit technology from Micronit allows researchers to realize a network of bulk-etched or powder-blasted microchannels and integrated electrodes in glass substrates. CMC's multi-project wafer service provides access to fully-documented design rules and process steps, design kits for Cadence and MEMS Pro, reference designs and more.

Sensonit

Image courtesy Dr. Karan Kaler, University of Calgary

Support Services

To get started or for more information, please contact fab@cmc.ca

Features

  • Dual plane in-channel electrode metallization (tantalum-gold electrodes)
  • Base process
    • 3 design layers (blasted holes, channel structures and in-channel metallization)
    • Bottom plate thickness of 170 microns
  • Process options
    • Optically transparent indium tin oxide
    • Bottom side chrome-nickel-gold metallization
    • Bottom plate thickness 100 or 140 micron

Applications 

  • Process options
  • Embedded electrodes in microfluidic devices
    • Electrical heating
    • Temperature sensing
    • Detection (amperometric, conductivity, electrical impedance)
    • Fluid manipulation

How to Access 

Check the fabrication schedule for upcoming fabrication runs and then submit your application