FAB

AMF Silicon Photonics General-Purpose Fabrication Process

Description

Features

  • SOI, 220 nm top Si, 2000 nm BOX
  • 193 nm lithography for waveguides
  • 6 implants for optical modulators
  • Ge deposition & implanting for photodetectors
  • Two metal levels for routing plus metal heater

Kits

Additional Libraries

Pricing

$14,000

(Per 3 x 8 mm2 design)

$14,000

(Per 3 x 8 mm2 design)

$4,300

(Per 3 x 8 mm2 design)

$4,300

(Per 3 x 8 mm2 design)

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