FAB

MEMSCAP PiezoMUMPs Process Technology

Description

PiezoMUMPs is a piezoelectric-based MEMS process for ME, ECE and biomedical researchers to develop sensors, energy harvesters, ultrasonic transducers, microphones, and self-contained microsystems for automotive, aerospace, healthcare and entertainment electronics markets.

Note: The expected number of chips to be delivered for this technology is 15.

Features

  • SOI MEMS
  • 25um structure layer
  • piezoelectric metal

Kits

Additional Libraries

Pricing

$900

(per 5 x 5 mm2 design) 

$900

(per 5 x 5 mm2 design) 

$325

(per 5 x 5 mm2 design) 

$325

(per 5 x 5 mm2 design) 

SponsorChip helps companies to academic researchers.