FAB

MEMSCAP PiezoMUMPs Process Technology

PiezoMUMPs is a piezoelectric-based MEMS process for ME, ECE and biomedical researchers to develop sensors, energy harvesters, ultrasonic transducers, microphones, and self-contained microsystems for automotive, aerospace, healthcare and entertainment electronics markets.

Note: The expected number of chips to be delivered for this technology is 15.

Features

  • SOI MEMS
  • 25um structure layer
  • piezoelectric metal

Pricing

Academics in Canada

$2,325
(per 5 x 5 mm2 design) 

Academics in Canada Peer Reviewed

$550
(per 5 x 5 mm2 design) 

SponsorChip helps companies enhance their research efforts and links to academic researchers.

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