MEMSCAP PiezoMUMPs Process Technology

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PiezoMUMPs is a piezoelectric-based MEMS process for ME, ECE and biomedical researchers to develop sensors, energy harvesters, ultrasonic transducers, microphones, and self-contained microsystems for automotive, aerospace, healthcare and entertainment electronics markets.

Note: The expected number of chips to be delivered for this technology is 15.


  • 10 μm structure layer
  • piezoelectric metal

Design Kits and Libraries


List Price
Price for Subscribers

(per 4.3 x 4.3 mm2 design) 

Note: List pricing does not include Engineering Support – contact fab@cmc.ca for a quote.

Note: Discounted pricing is available to academics in Canada with a CMC Subscription. You must sign in to see it.


Minimum Subscription Required: Research

Does your research benefit from products and services provided by CMC Microsystems?

The CMC SponsorChip program helps companies enhance their research efforts and links to academic researchers.

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