MEMSCAP PiezoMUMPs Process Technology


PiezoMUMPs is a piezoelectric-based MEMS process for ME, ECE and biomedical researchers to develop sensors, energy harvesters, ultrasonic transducers, microphones, and self-contained microsystems for automotive, aerospace, healthcare and entertainment electronics markets.

Note: The expected number of chips to be delivered for this technology is 15.


  • 25um structure layer
  • piezoelectric metal

Design Kits and Libraries


Subscribers (Academics in Canada)
Subscribers (Academics in Canada, Peer Reviewed)
Academics outside of Canada or Industry

(per 4.3 x 4.3 mm design) 

(per 4.3 x 4.3 mm design)

Contact fab@cmc.ca for MPW access, or sales@cmc.ca for a dedicated run.

Minimum Subscription Required: Research

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