The table below lists most of the introductory training modules for this suite. They are designed specifically for new users, and provide work-able examples and exercises. Not all modules are listed here. For the complete list, and to run the tutorials, see the original document on our LINUX STC disk. Module descriptions have been taken from the HTML front page of the tutorial introduction. Directions for locating the tutorial on the disk are given at the end of the table.
|Sentaurus Workbench||Sentaurus Workbench is the primary graphical front end that integrates TCAD Sentaurus simulation tools into one environment. It is used to design, organise, and run simulations. Command to run Sentaurus Workbench: swb|
|Sentaurus Process is a process modeling/simulation environment. In this module, users may add ion implantation steps, diffusion species, annealing steps, etc. for the partial full and sequential modelling of a complete I.C. or photonics fabrication process. Command to run Sentaurus Process: sprocess|
|IC WorkBench Edit/View Interface||This viewer displays and allows editing of process mask information such that it can be used in Sentaurus Process and Sentaurus Interconnect. Command to run IC Workbench: icwbev|
|Sentaurus Topography 3D||Sentaurus Topography 3D is a three-dimensional simulator for evaluating and optimising critical topography-processing steps, such as etching and deposition. Note: This CAD module is not part of the North American University bundle. It is listed here as a courtesy to our subscribers.|
|Sentaurus Interconnect is an advanced one-, two- and three-dimensional simulator suitable for IC interconnect reliability analysis. Command to run Sentaurus Interconnect: sinterconnect|
|Sentaurus Structure Editor||
Sentaurus Structure Editor is a two- and three-dimensional device editor, and three-dimensional process emulator. It employs a graphical user interface (GUI), and is script-able. Command to run Sentaurus Structure Editor: sde
Sentaurus Mesh is a mesh generator of discretisation grids for complex two- and three-dimensional devices. It integrates two mesh engines: the axis-aligned mesh generator and the tensor-product mesh generator. Command to run Sentaurus Mesh: snmesh
Sentaurus Device simulates the electrical, thermal, and optical characteristics of semiconductor devices. It handles one-, two- and three-dimensional geometries and mixed-mode circuit simulation with compact models. Command to run Sentaurus Device: sdevice
|Sentaurus Device EMW||Sentaurus Device Electromagnetic Wave Solver (EMW) is a simulation module for the numeric analysis of electromagnetic waves. It is a full-wave time-domain simulator based on the finite-difference time-domain (FDTD) method, and is typically used to calculate optical carrier generation in optoelectronic devices. Command to run Sentaurus Electromagnetic Wave Solver: emw|
|TCAD to SPICE||Products are designed to enable SPICE-level circuit analysis based on TCAD data, which is a critical component of the deisgn-technology co-optimisation (DTCO) flow. Note: This CAD module is not part of the North American University bundle. It is listed here as a courtesy to our subscribers.|
|Sentaurus Visual||Sentaurus Visual is a plotting tool for TCAD simulations and experiments. It enables users to work interactively with data using a GUI and to automate tasks with Tcl-based scripting. From the year 2013 onwards, it replaced TecPlot in the standard University bundle. Command to run Sentaurus Visual: svisual|
|Inspect||Inspect is a plotting and analysis tool for xy data such as doping profiles and electrical characteristics of semiconductor devices. Command to run Inspect: inspect|
Sentaurus Data Explorer
|Sentaurus Data Explorer is a tool for editing and converting data from simulations. Command to run Sentaurus Data Explorer: tdx|
Tool Command Language (Tcl)
Several TCAD Sentaurus products use the tool command language (Tcl). There are also references on the web for this programming language. An Internet search will reveal some of the more common ones.
Many of these modules can be entered as part of a process flow in Workbench, or run individually from the command line (commands listed above, in bold type). To open the manuals for each, do so either from the Workbench GUI:
Help | Manuals…
… or from the *.pdf directory on the disk:
/CMC/tools/synopsys/<sentaurus release>/tcad/<main directory>/manuals/PDFmanual
The manuals are grouped according to module function (Figure 1).
Figure 1. TCAD Sentaurus manuals are grouped according to module function.
The directory containing the previously-mentioned training exercises is part of each TCAD release, and is located on our STC disk here:
/CMC/tools/synopsys/<sentaurus release>/tcad/<sentaurus release>/Sentaurus_Training/
It can also be launched from within Workbench from its Help pull-down menu (Figure 2):
Figure 2. The TCAD Sentaurus tutorial in Release 2019.03, launched from the Help menu the Sentaurus WorkBench main window.
Note: To re-iterate, this tutorial refers to the TecPlot program, which as of the 2013 TCAD releases has been removed from the North American university bundle(s). Its replacement is Sentaurus Visual.