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3iT Superconducting Quantum Al_JJ_Nb Two-layer Process

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Description

CMC offers this process as part of a Multi-project wafer (MPW) service. This process consists of Aluminum-Aluminum oxide-Aluminum Manhattan-style Josephson junctions with an additional Nb layer for the other circuit structures. The substrate is sapphire, and the critical current density is 2 uA/um2 with a junction size ranging from 100 nm to 300 nm.

Note: The expected number of chips to be delivered for this technology is 10.

Applications

  • Josephson junctions
  • SQUIDs
  • JPA (Josephson parametric amplifier)
  • Low temperature electronics
  • Qubits

Services

  • Design kits
  • Design rule checking services
  • CMC engineering support

Features

  • Al-Al-ALOx-AL Manhattan junctions (30-x-60 nm) thickness
  • Current density around 2 uA/um2
  • Sapphire substrate
  • Nb layer 100 nm with a 4 ohm/square resistivity and a 0.6 pH/square kinetic inductance
  • Resonators with Q-factor of approx. 1 million
  • T1 and T2 of qubits from test runs of 35 us
  • 5 x 5 mm design space

Design Kits and Libraries

Pricing

List Price
Price for Subscribers

$5,060
(per 5 mm x 5 mm design)

Note:
  1. List pricing is in US funds and does not include engineering support. Contact [email protected] for a quote.
  2. Prices are subject to change.
Note:

Discounted pricing is available to academics in Canada with a CMC Subscription. You must sign in to see it.

Licensing

Minimum Access Requirement

For Canadian Academics

Does your research benefit from products and services provided by CMC Microsystems?

FABrIC Challenges

Stimulating innovation in semiconductor fabrication processes for product development

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