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Faster Etch and Deposition Recipe Development with SandBox™ Studio
Event Details
July 16, 2020 @2:00 pm EDT
The development of etch and deposition recipes for the manufacturing of microelectronic, MEMS, and integrated microelectronic and photonic devices is time consuming and expensive. The global microelectronics industry spends over $1.2 billion (USD) per year on the development of etch and deposition recipes alone. The state-of-the-art identification of etch and deposition recipes is through empirical trial and error. In this talk, modeling and visualization techniques embodied in the software SandBox™ Studio will be presented which have been shown to reduce the time and cost for etch and deposition recipe development by a factor of three. Using statistical and physics-based models, SandBox™ Studio provides an efficient framework to curate and interpret experimental data and identify the process regions to achieve desired critical dimensions for etch and deposition processes involving multiple materials and process steps. The power of the SandBox™ Studio will be presented through a case study on the identification of an optimal high aspect ratio etch for 3D NAND. A live demonstration of the software will also be presented to show how it can accelerate recipe creation in the lab.
Speaker: Dr. Meghali Chopra is the CEO and co-founder of SandBox™ Semiconductor. She received her B.S. degree with honors, in Chemical Engineering from Stanford University in 2011 and her Ph.D. in Chemical Engineering from the University of Texas at Austin in 2017. As a National Science Foundation Graduate Research Fellow, her doctoral work focused on the use of model-based experimental design to optimize plasma-based etch and deposition. In 2016, Dr. Chopra received 1st place at Texas Venture Labs Investment Competition and 1st Place at the University of Texas at Austin’s Idea-to-Product competition. In 2017, Dr. Chopra received a Courageous Woman award at the Rice Business plan competition. Dr. Chopra was recently recognized as a winner in the Forbes 30 under 30 Science category and is co-inventor of several of SandBox’s proprietary technologies.
SandBox Semiconductor: Founded in June 2016, the goal of SandBox Semiconductor is to be the primary supplier of process development software tools to the semiconductor industry. Using SandBox Semiconductor’s advanced predictive simulation tools, process development is faster and leaner, reducing time to market and overall costs. SandBox Semiconductor works globally with chip manufacturers and tool makers to deliver customized software solutions for their most challenging etch and deposition processes.