SoftMEMS/L-Edit Training 2022

March 28 and 29, 2022, online

This two-day training comprises of an introduction to the L-Edit layout editor, SoftMEMS 3D fabrication modeller plus links to FEM on day 1 and covers an example of design flow involved in interacting with a foundry for a PMUT device on day 2.

L- Edit includes a fully hierarchical and full custom editor engineered for MEMS and IC design.  L-Edit is a layout tool that can create the masks that are used to fabricate an integrated circuit or MEMS device and contains many features dedicated to creating MEMS-specific layouts.  Popular output formats are supported so mask designs are “foundry ready” to send to CMC. The SoftMEMS tools can be used for creating 3D models from the layouts to be used for understanding the fabrication process-mask interactions or as inputs to popular FEM tools such as COMSOL, OnScale or ANSYS. Learn more about L-Edit. Day 1 will cover how to create layout for MEMS devices and how to make and manipulate solid models from technology descriptions and layout.

MEMS-based piezoelectric micromachined ultrasound transducers (PMUTs) are diaphragm-like thin film flexural transducers typically formed on silicon substrates. Day 2 of the course demonstrates how L-Edit/SoftMEMS is used in a MEMS design flow using an example design of a PMUT device. We will also cover topics on best practices to follow to develop your layout to make it foundry ready (i.e., DRC clean) and take into account aspects of integration and packaging. Students will learn the output formats to send designs to the foundry and how to submit designs to CMC. The class will cover how to run the design rule checker for a sample PMUT process and how to work with technology files and libraries that are typically given by foundries as well as how to create a solid model of a sample PMUT device and send to FEM.

Attendees may opt to attend either day 1 or day 2 or both.

Target Attendees

The prime target attendees are PMUT technology developers and those who are interested in getting a background in Layout design.


  • If you will be accessing L-Edit through CMC, you must be physically located in Canada.
  • If accessing L-Edit independent of CMC, you must secure your own L-Edit license in accordance with the applicable license terms or contact CMC if you need access to a temporary L-Edit license.
  • You have a computer and internet connection for the online course.


March 28 and 29, 2022

Day 1 (L-Edit)

  • Session 1 (L-Edit intro): 9:30 am to 3:00 pm
  • Session 2 (3D Modeling): 3:15 pm to 5 pm

Day 2 (Example design flow of PMUT)

9:30 am to 5:30 pm, with the following breaks:

  • Short break: 5 min break every hour
  • Lunch break: 12:30 pm to 1:00 pm
  • Tea break: 3:00 pm to 3:15 pm
OnlineSee the course outline.

Pricing and Registration

Registration will be closed on March 23, 2022, at 12 pm EDT.

Attendee GroupDay 1Day 2
CNDN Subscriber$100$100
General Admission$500$500

Equipment Requirements

The training will use the attendees’ laptops. It is recommended to use a Windows host PC with:

  • at least an Intel® Core™ i5 quad-core processor (or equivalent),
  • at least 16 GB of memory (32GB for best results), and
  • at least 300 GB hard drive space, to facilitate all the downloads and the final installations.



Dr. Mary Ann Maher

SoftMEMS/L-Edit TrainingDr. Mary Ann Maher received her Ph.D. from Caltech in 1989 in semiconductor device modelling developing a new charge-based transistor model. At Caltech, she conducted research in neuromorphic systems, analog circuits, and transistor modelling. She pursued post-doctoral studies at the CSEM in Neuchatel, Switzerland, where she studied analog memories and designed low-power analog ICs with on-chip sensors for artificial vision applications. At Tanner Research she began the simulation and modelling group and launched Tanner’s T-Spice analog circuit simulator product. She then became the Software Architect responsible for specifications for layout, routing, simulation, analysis, schematic and viewing design tools. As Director of Advanced Products, she brought to market Tanner’s MEMS Pro microsystem and MCM Pro multi-chip module and packaging design tool suites. Moving to MEMSCAP, she became the company’s CTO and later the General Manager and Executive Vice President of the Design Automation Business Unit. In 2004, she started SoftMEMS, LLC, the maker of the popular microsystems design tools – MEMS Pro and MEMS Xplorer, where she serves as CEO.


If you have any comments or questions regarding the course content or registration, please contact cad@cmc.ca.


Course cancellations must be received in writing at least three (3) days before the beginning date of the course in question to receive a full refund of the registration fee. A cancellation made after the deadline will not receive a refund. CMC Microsystems makes no commitments on refunds for travel or accommodations.

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