FAB

VTT Niobium SWAPS Junction Process

Description

This 2-layer process allows for the fabrication of Niobium side-wall passivated junctions via an Nb-Al-AlOx-Nb tri-layer, alongside an Nb wiring layer on top. 

CMC offers this process as part of a multi-project wafer (MPW) service.

  • Nb-Al-ALOx-Nb trilayer junctions 
  • High-resistivity silicon substrate
  • Nb wiring layer on top

The process provides 20 copies of the designs.

Applications

  • Josephson junctions
  • SQUIDs
  • JPA (Josephson parametric amplifier)
  • Low temperature electronics
  • Resonators
  • Qubits

Services

  • Design kits
  • Design rule checking services
  • CMC engineering support

Features

One tri-layer for junctions and an additional metallic layer

Pricing

List Price
Price for Subscribers

$7,375
(per 5 x 5 mm design)

Note: List pricing does not include Engineering Support – contact fab@cmc.ca for a quote.

Note: Discounted pricing is available to academics in Canada with a CMC Subscription. You must sign in to see it.

Licensing

Contact licensing@cmc.ca.

Minimum Subscription Required: Research

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