MEMS Design Training 2024

May 8 and 9, 2024. Online

CMC Microsystems’ MEMS Design Training 2024 offers the design of multiple MEMS devices using the aid of simulation tools and basic MEMS fabrication technologies. We will introduce CMC’s multi-project PolyMUMPs design kits and how to implement the devices designed in the training using the technology. The PolyMUMPs technology is a triple polysilicon, single metal surface micromachining process with deposited oxide (PSG) as the sacrificial material, and silicon nitride for electrical isolation from the substrate. In addition to exposure to layout editing CAD tools.

Optical MEMS has created a new fabrication paradigm for optical devices and systems. Tailored for cost-effective wafer-scale manufacturing, these optical MEMS devices leverage processes derived from the semiconductor industry. The pivotal capability to steer and direct light defines the essence of optical MEMS switches. Originally driven by display technologies, the evolution of optical MEMS switches has seamlessly transitioned into telecommunications. Large all-optical switches can reduce the need for optical-electrical-optical conversions in internet traffic routing through fibre optic networks. Key aspects of an optical MEMS switch are moving mechanical parts referred to as MEMS, and optical signal transmission parts that can consist of precise waveguides and micro mirrors.


As part of this online training, participants will learn:

  • Introduction to the theory of operation of basic MEMS actuators.
  • RF switches and resonators.
  • Demonstration using COMSOL Multiphysics for modelling MEMS thermal, mechanical, and electromagnetic behaviour.
  • Basics of optical MEMS technology.
  • Microfabrication process for SiN integration with SOI-based MEMS.
  • PiezoMUMPs technology for hybrid MEMS actuator design.
  • FEM of electrostatic and piezoelectric MEMS actuator designs in COMSOL Multiphysics.
  • FEM simulation of waveguide propagation loss, coupling loss and bending loss.
  • Microfabrication process for MEMS design validations using PiezoMUMPs technology.
  • A brief overview of the microfabrication mask layout design required for MEMS integration with optical waveguides.

Target Attendees

The prime target attendees are university students who want to learn basic design methodology to develop MEMS devices. Registration is open to university students and researchers.


You are a faculty member, student, or research staff member from a Canadian or non-Canadian academic institution. You must have a computer and internet connection for the online course.


May 8 and 9, 2024

10:00 am to 5:30 pm (EDT)



Day 1 – May 08 (Wednesday)

Time (EDT)Session
10:00 AM – 12:00 PM
  • Introduction to MEMS
  • COMSOL Multiphysics Introduction
12:00 PM – 01:00 PMBreak 1
01:00 PM – 03:00 PM
  • Introduction to PiezoMUMPs
  • COMSOL for Designing Hybrid Actuation MEMS Device
03:00 PM – 03:30 PMBreak 2
03:30 PM – 05:30 PM
  • Introduction to Optical MEMS
  • Microfabrication Process for SiN Integration with SOI-based MEMS for Optical Switching
  • Questions and Answers

Day 2 – May 09 (Thursday)

Time (EDT)Session
10:00 AM – 12:00 PM
  • Optical Simulations for Efficient Optical Switch Design
  • Questions and Answers
12:00 PM – 01:00 PMBreak 1
01:00 PM – 03:00 PM
  • Introduction to Mask Layouts
  • Introduction to PolyMUMPs
03:00 PM – 03:30 PMBreak 2
03:30 PM – 05:30 PM
  • COMSOL for Designing RF MEMS Device
  • Questions and Answers

Pricing and Registration

Attendee GroupPriceRegistration
General Admission$2000

* A discounted price is available for multiple students from the same subscriber account. Contact Sarah J. Neville for details.



Amr Samir

  • Introduction to MEMS
  • Introduction to PolyMUMPs
  • Introduction to mask layouts
  • COMSOL Multiphysics introduction
  • COMSOL for designing RF MEMS
Amr Samir is an RF/MEMS/NEMS Packaging and Integration Technical Staff at CMC Microsystems with a Ph.D. degree in electrical engineering from the University of Waterloo, Ontario.

Suraj Sharma

  • Introduction to optical MEMS
  • SiN integration with SOI MEMS
  • Introduction to PiezoMUMPs
  • COMSOL for hybrid actuation MEMS
Suraj Sharma is a Ph.D. researcher at École de Technologie Supérieure (ÉTS), developing MEMS-based planar optical switching solutions for telecommunication applications. At CMC Microsystems, he is a staff scientist in the MEMS, nanofabrication, and integration team, helping to lower the barriers to implementing MEMS designs in existing and upcoming MPW processes.

Niharika Kohli

Optical simulations for efficient optical switch designNiharika Kohli is a staff scientist in the photonics team at CMC Microsystems. Prior to CMC, she worked as a post-doc at ETS. Her expertise includes the design, simulation, and characterization of silicon photonic devices. She helps with Photonic MPW runs and PDK development at CMC.


If you have any comments or questions regarding the course content or registration, please contact Sarah J. Neville.


Course cancellations must be received in writing at least one (1) week before the beginning date of the course in question to receive a full refund of the registration fee. A cancellation made after the deadline will not receive a refund. CMC Microsystems makes no commitments on refunds for travel or accommodations.

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