Passive Silicon Photonics Fabrication Workshop 2022

Online, live October 24 to November 4, 2022

CMC and its SiEPIC partner professors are offering this legendary Silicon Photonics Fabrication Workshop online.

This workshop trains students in the design, fabrication, and test of photonic integrated circuits (PICs) targeting the AMF Si Photonics technology, available through CMC Microsystems and ANT NanoSOI Technology. It can be a stand-alone learning opportunity or combined with your research and/or development. Target applications include optical communications and sensors.

SiemensLumerical (now part of the ANSYS family)LucedaEHVA and Applied NanoTools are supporting this workshop by providing access arrangements to their tools for participants inside of Canada (more information below).

Important Notes

  1. We provide four registration options. Only academics who are currently registered with a Canadian university are eligible to register for Option 1 or 2. Students that are not registered in a university are welcome to register option 3 or 4.
  2. If you are registering in an option that includes fabrication (Options 1, 2, and 3), you will be required to complete two export control questionnaires. Contact Sarah Neville (Neville@cmc.ca) to get a copy of the questionnaires.
  3. To obtain access to confidential technology information provided during the workshop, your organization is required to sign a Non-Disclosure Agreement (NDA) with CMC Microsystems. Please contact Jennifer Draper (draper@cmc.ca) to facilitate the NDA execution process prior to October 3, 2022.
  4. Workshop participants will have access to other proprietary and confidential information during the workshop, each participant is required to sign an Access to Intellectual Property & Non-Disclosure Agreement. Participants should submit a signed agreement to Sarah Neville (Neville@cmc.ca) prior to October 17, 2022.


Completion of an undergraduate program in electrical engineering or applied physics.


Before classAt your own schedulePre-recorded video lectures, tutorials, and activities
October 24 to November 4, 202212:00 pm to 3:00 pm ESTVideo Conference call via Zoom

Pricing and Registration

The registration deadline is October 14, 2022.

OptionOption 1 – Canadian academics for course creditsOption 2 – Canadian academics for researchOption 3Option 4

Canadian academics register one of the graduate courses:

  • UBC ELEC 582
  • Laval GEL7070 or GEL7071
Canadian academics who have (or whose supervisor has) a subscription with CMC

For engineers and researchers from organizations of

  • Universities outside of Canada
  • Research institutes
  • Companies
DescriptionA three-credit graduate course in the fundamentals of silicon photonics device and circuit design, fabrication, and testing, beginning with the online workshopA year-long training in the silicon photonics device and circuit design, fabrication, and testing, beginning with the online workshopA year-long training in the silicon photonics device and circuit design, fabrication, and testing, beginning with the online workshopWorkshop and recorded material. Fabrication is not included.
  • Discounted fabrication fee: $1,250
  • Registration fee includes chip fabrication area on a shared fabrication run.
  • Preferred pricing: $1,600
  • Registration fee includes tuition and chip fabrication on a shared MPW run.
  • Standard pricing
    • Industry: $7,750
    • Academic: $6,750
  • Registration fee includes tuition and chip fabrication on a shared MPW run.
  • Standard pricing:
    • Industry: $2,900
    • Academic: $1,650
  • Tuition only, fabrication is not included.
  1. Siemens license imposes access restrictions on non-academic participants. Contact Jessica Zhang at zhang@cmc.ca for details.
  2. Visiting students from institutions noted in Appendix A may register for UBC ELEC 582.
  3. Students from Universities in Quebec can register for Laval GEL 7070 or 7071. Contact the professors for eligibility ( shi@gel.ulaval.ca)
  4. A discount is available on options 3 and 4 for multiple participants from the same organization. Contact Zhang@cmc.ca for details.

Training Schedule

  • Online pre-recorded video lectures, tutorials, and activities (self-paced, after registration is confirmed)
  • Online Passive workshop: October 24 – November 4, 2022
    • Access to software tools, tutorials, and online discussion forums
    • Design feedback provided
  • ANT fabrication signup deadline: November 21, 2022
  • ANT tape-out design submission deadline: December 5, 2022
  • AMF design proposal deadline: February 13, 2023
  • Design submission (layout deadline): March 6, 2023
  • Device shipment date: September 2023

Technology Description

AMF Technology

  • Silicon-on-insulator, 220 nm top Si film, 2000 nm buried oxide (BOX)
  • 193 nm deep UV lithography on Si etching layers, enabling features down to ~150 nm
  • Supports design and fabrication of a range of PICs including:
    • photonic crystals
    • waveguides (photonic crystal or ridge)
    • gratings for fibre coupling
    • multiplexers (diffraction or arrayed waveguide)
    • ring resonators
    • filters
  • Fabrication is carried out at AMF, Singapore

ANT Technology

  • Silicon-on-insulator, 220-nm top Si film, 2000-nm buried oxide (BOX)
  • Electron beam lithography, enabling features down to 60 nm
  • Supports:
    • waveguides (strip)
    • gratings for fibre coupling
    • metal heaters for thermo-optic phase shifting
    • deep trench and nano-tapers for edge coupling
    • multiplexers, filters, ring and disk resonators
  • Fabrication is carried out by Applied Nanotools in Canada
  • Other capabilities such as edge couplers, oxide window openings and thermal isolation trenches are available outside of the workshop through Applied Nanotools.

Workshop Details

Instruction Syllabus Summary

  • Photonics passive device theory and modelling.
  • Fabrication processes and design kits
  • Lumerical MODE Solutions, FDTD Solutions, INTERCONNECT
  • Layout & verification
    • CAD tools: K-layout, Siemens Tanner and Calibre
  • Design for test and design for fabrication

Access to Tools

  • Siemens– Siemens offers workshop attendees from academic institutions no-cost access to Tanner and Calibre licenses during the workshop and following the workshop, for the purpose of completing their workshop designs. License accesses for industrial participants will be reviewed by Siemens (Mentor) on a case-by-case basis.
  • ANSYS Lumerical– UBC offers workshop attendees inside of Canada no-cost access to Lumerical teaching license during the workshop and following the workshop for the purpose of completing their workshop designs. Participants who are located outside of Canada must be self-licensed to the Ansys Lumerical tools.
  • IPKISS and IPKISS AWG Designer from Luceda Photonics– Luceda offers workshop attendees no-cost access to Luceda’s evaluation licenses for 30 days starting from the workshop.


If you have any comments or questions regarding the workshop content or registration, please contact Jessica Zhang.


Workshop cancellations must be received in writing at least one (1) week before the beginning date of the workshop in question to receive a full refund of the registration fee. A cancellation made after the deadline will not receive a refund. CMC Microsystems makes no commitments on refunds for travel or accommodations.

Appendix A

Students enrolled in graduate programs at other Canadian universities may enroll in the UBC course as visiting students. Application to UBC graduate school is required. Conditions may apply. Details can be found at:

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