Event

Active Silicon Photonics Fabrication Course 2022

On-line, live May 30 to Jun 10, 2022

In response to COVID-19 Pandemic, CMC, the SiEPIC Program, and our partner professors from UBC, Laval and Queen’s are offering this legendary Silicon photonics course online.

This course trains students in the design, fabrication, and test of photonic integrated circuits (PICs) targeting the AMF Si Photonics technology, and the ANT NanoSOI Si Photonics technology available through CMC Microsystems.

Siemens, Lumerical (now part of the ANSYS family), Luceda, EHVA, and Applied NanoTools are supporting this course by providing access arrangements to their tools and services for participants inside of Canada (more information below).

Important Notes

  1. You must be physically located in Canada while taking this course.
  2. We provide four registration options. Only academics who are currently registered with a Canadian university are eligible to register for Option 1 or 2. Students that are not registered in a university are welcome to register option 3 or 4.
  3. If you are registering in an option that includes fabrication (Options 1, 2, and 3), you will be required to complete two export control questionnaires. Contact Sarah Neville (Neville@cmc.ca) to get a copy of the questionnaires.
  4. To obtain access to confidential technology information provided during the course, your organization is required to sign a Non-Disclosure Agreement (NDA) with CMC Microsystems. Please contact Sarah Neville (Neville@cmc.ca) to facilitate the NDA execution process prior to May 16, 2022.
  5. Course participants will have access to other proprietary and confidential information during the course, each participant is required to sign an Access to Intellectual Property & Non-Disclosure Agreement. Participants should submit a signed agreement to Sarah Neville (Neville@cmc.ca) prior to May 23, 2022.

Pre-requisites

Completion of the Passive Silicon Nanophotonic course, experience with PIC design, or permission from the instructors.

Schedule

DateTimeLocation
May 30 to June 10, 202211:00 am to 2:00 pm EDTVideo Conference call via Zoom

Pricing and Registration

OptionOption 1Option 2Option 3Option 4
DescriptionA three-credit graduate course in the fundamentals of active silicon photonics device and circuit design, fabrication, and testing.A year-long training in the fundamentals of active silicon photonics device and circuit design, fabrication, and testing.A year-long training in the fundamentals of active silicon photonics device and circuit design, fabrication, and testing.

Workshop-only

  • Include: online workshop;  pre-recorded material.
  • Not include: Chip fabrication
Price

$750 discounted fabrication fee

The registration fee includes chip fabrication area on shared ANT and AMF fabrication run.

Preferred pricing: $1,150

The registration fee includes tuition and chip fabrication area on shared ANT and AMF fabrication runs.

Standard pricing including tuition and fabrication fee:

  • Industry: $8,250
  • Academic: $7,000

Registration fee includes chip fabrication area on shared AMF and ANT fabrication runs.

Standard pricing for tuition-only fee:

  • Industry: $2,900
  • Academic: $1,650
Eligibility

This pricing option requires course registration for one of the following (see Special Notes):

  • UBC ELEC 581
  • Laval University GEL 7070 or GEL 7071
  • Queen’s PHYS 982
This price option is available only to Canadian academics who have (or whose supervisor has) a subscription with CMC.These pricing options are available for any researcher that is not eligible for Options 1 and 2.
Special Notes
  1. Visiting students from institutions noted in Appendix A may register for UBC ELEC 581.
  2. You must be physically located in Canada while taking this course.
  3. Siemens license imposes access restriction to non-academic participants. Contact Jessica Zhang at zhang@cmc.ca for details.
Registration
Note: A discount is available on options 3 and 4 for multiple participants from the same organization. Contact Jessica Zhang at zhang@cmc.ca for details.

Training Schedule

  • On-line pre-recorded video lectures, tutorials, and activities (passives, introduction to actives): After registration.
  • On-line Actives course: May 30 to June 10, 2022
  • On-line pre-recorded video lectures, tutorials, and activities available throughout the year
  • Design, modelling, and mask layout: June to October 2022
    • Access to software tools, tutorials, and online discussion forums
    • Design feedback provided
  • ANT fabrication signup: July 5, 2022
  • ANT layout submission deadline: July 19, 2022
  • AMF Design proposal deadline: September 19, 2022
  • Design review: October 3 to 7, 2022 (for students benefiting from discounted pricing, your faculty supervisor’s sign-off on the design report and mask layout is required before your design can proceed to fabrication)
  • Design submission (layout deadline): October 10, 2022
  • Device shipment date: April 2023
  • Device testing and model validation: May and June 2023
  • Final report: July 2023

Technology Description

AMF Technology

  • Silicon-on-insulator, 220-nm top Si film, 3000-nm buried oxide (BOX)
  • 193-nm deep UV lithography, enabling features down to 150 nm
  • Supports design and fabrication of a range of components and systems consisting of:
    • modulators
    • detectors
    • waveguides (strip or ridge)
    • gratings for fibre coupling
    • deep trench and nano-tapers for edge coupling
    • multiplexers (diffraction or arrayed waveguide) and filters (resonators, Bragg gratings)
    • ring and disk resonators
  • Fabrication is carried out at AMF in Singapore.

ANT Technology

  • Silicon-on-insulator, 220-nm top Si film, 2000-nm buried oxide (BOX)
  • Electron beam lithography, enabling features down to 60 nm
  • Supports:
    • waveguides (strip)
    • gratings for fibre coupling
    • metal heaters for thermo-optic phase shifting
    • deep trench and nano-tapers for edge coupling
    • multiplexers, filters, ring and disk resonators
  • Fabrication is carried out by Applied Nanotools in Canada
  • Other capabilities such as edge couplers, oxide window openings and thermal isolation trenches are available outside of the course through Applied Nanotools.

Course Details

Instruction Syllabus Summary

  • Fabrication processes and design kits
  • Device modelling (detectors, modulators, rings, MZI, PN & PIN junctions, thermal tuning, optical components, microwave design of electrodes)
    • CAD tools: Lumerical MODE Solutions, FDTD Solutions, INTERCONNECT and DEVICE
  • Layout & verification
    • CAD tools: K-layout, Siemens Tanner and Calibre
  • Design for Test and design for fabrication

Access to Tools

  • From Siemens:
    • Siemens offers workshop attendees from academic institutions free access to Tanner and Calibre during the workshop and following the workshop, for the purpose of completing their course designs. Condition on access regions may apply.
    • From Ansys Lumerical:
      • UBC offers workshop attendees inside of Canada free access to Lumerical teaching license of MODE Solutions, FDTD Solutions, INTERCONNECT and DEVICE during the workshop and following the workshop for the purpose of completing their course designs.
      • Participants who are located outside of Canada must be self-licensed to the Ansys Luermical tools.

Contact

If you have any comments or questions regarding the course content or registration, please contact Jessica Zhang at zhang@cmc.ca.

Cancellations

Course cancellations must be received in writing at least one (1) week before the beginning date of the course in question to receive a full refund of the registration fee. A cancellation made after the deadline will not receive a refund. CMC Microsystems makes no commitments on refunds for travel or accommodations.

Appendix A

Students enrolled in graduate programs at other Canadian universities may enroll in the UBC course as visiting students. Application to UBC graduate school is required. Conditions may apply. Details can be found at:
https://www.grad.ubc.ca/prospective-students/application-admission/visitors-canadian-universities

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