Piezoelectric Micromachined Ultrasonic Transducer (PMUT) for fingerprint sensing, medical imaging, industrial sensors, biosensors, gesture control. For a complete description, see the webinar at SilTerra – PMUT Webinar on Emerging PMUT Applications and Manufacturing Solutions – YouTube.
SilTerra Piezoelectric Micromachined Ultrasonic Transducer (PMUT)
- AlN or AlScN piezo layer
- Resonant Frequency < 25 MHz
- Possibility of monolithic CMOS integration.
Design Kits and Libraries
Design kits are available in:
- Cadence: M13P MEMS Cadence Process Design Kit, and
- MEMSPro: M13P MEMSPro Process Design Kit (TDB)
which are directly downloadable from SilTerra’s MyFab portal.
(per 5 x 6 mm2 design)