Piezoelectric Micromachined Ultrasonic Transducer (PMUT) for fingerprint sensing, medical imaging, industrial sensors, biosensors, gesture control. For a complete description, see the webinar at SilTerra – PMUT Webinar on Emerging PMUT Applications and Manufacturing Solutions – YouTube.
FAB
SilTerra Piezoelectric Micromachined Ultrasonic Transducer (PMUT)
Description
Features
- AlN or AlScN piezo layer
- Resonant Frequency < 25 MHz
- Possibility of monolithic CMOS integration.
Design Kits and Libraries
Design kits are available in:
- Cadence: M13P MEMS Cadence Process Design Kit, and
- MEMSPro: M13P MEMSPro Process Design Kit (TDB)
which are directly downloadable from SilTerra’s MyFab portal.
Pricing
List Price
Price for Subscribers
$12,067
(per 5 x 6 mm2 design)
Note: List pricing does not include Engineering Support – contact fab@cmc.ca for a quote.
Note: Discounted pricing is available to academics in Canada with a CMC Subscription. You must sign in to see it.
Licensing
- Help with Licensing
- Contact licensing@cmc.ca
Minimum Subscription Required: Research
To Access
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