SilTerra Piezoelectric Micromachined Ultrasonic Transducer (PMUT)


Piezoelectric Micromachined Ultrasonic Transducer (PMUT) for fingerprint sensing, medical imaging, industrial sensors, biosensors, gesture control. For a complete description, see the webinar at SilTerra – PMUT Webinar on Emerging PMUT Applications and Manufacturing Solutions – YouTube.

Note: The expected number of chips to be delivered for this technology is 25 dice per design.


  • AlN or AlScN piezo layer
  • Resonant Frequency < 25 MHz
  • Possibility of monolithic CMOS integration.

Design Kits and Libraries

Design kits are available in:

  • Cadence: M13P MEMS Cadence Process Design Kit, and
  • MEMSPro: M13P MEMSPro Process Design Kit (TDB)

which are directly downloadable from SilTerra’s MyFab portal.


List Price
Price for Subscribers

(per 5 x 6 mm2 design)

Note: List pricing does not include Engineering Support – contact fab@cmc.ca for a quote.

Note: Discounted pricing is available to academics in Canada with a CMC Subscription. You must sign in to see it.


Minimum Subscription Required: Research

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