Compound Semiconductor Epitaxy



CMC supports prototyping services to grow a variety of structures on InP, GaAs and Ge substrates through industrial standard foundries, for research and applications in optoelectronics and photonics. Subsidized rates are available for CMC subscribers.

Methods of Epitaxy

  • Molecular Beam Epitaxy (MBE) on GaAs and Ge substrates
  • Gas-Source MBE on InP substrate
  • Metal-Organic Chemical Vapor Deposition (MOCVD) on InP, GaAs and Ge substrates

Typical Epitaxial Structures

  • Multi Quantum Well (MQW) lasers
  • Quantum Dot lasers
  • Vertical Cavity Surface Emitting Lasers (VCSELs)
  • Electro-absorption Modulators (EAMs)
  • Photo-detectors
  • Solar Cells
  • Nonlinear Optical Devices

Typical Foundries

  • Canadian Photonics Fabrication Center (CPFC), Canada
  • FBH, Germany
  • Landmark Optoelectronics, Taiwan
  • Azastra Optoelectronic, Canada

The available alloys, wafer specifications, metrologies and prices vary with foundries. Please contact zhang@cmc.ca for details.


  • Molecular Beam Epitaxy (MBE)
  • Gas-Source MBE
  • Metal-Organic Chemical Vapor Deposition (MOCVD)

Design Kits and Libraries


List Price
Price for Subscribers

Note: Discounted pricing is available to academics in Canada with a CMC Subscription. You must sign in to see it.


Minimum Subscription Required: Research

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