FAB

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VTT Aluminum Junction Process

Description

This process allows for fabrication of coplanar structures on a high-resistivity silicon substrate, like resonators with quality factors of about one million. Aluminum junctions (Manhattan style) fabricated via electron-beam lithography can be used to make transmon qubits.

CMC offers this process as part of a multi-project wafer (MPW) service.

  • Al-AlOx-Al junctions with normal-state resistance ranging from 4k to 15 kOhm
  • High-resistivity silicon substrate
  • Nb wiring layer

Applications

  • Josephson junctions
  • SQUIDs
  • Resonators
  • Qubits
  • Low-temperature electronics

Services

  • Design kits
  • Design-rule checking services
  • CMC engineering support

Features

  • Nb resonators with Q-factor of approximately one million
  • Aluminum junctions

Pricing

List Price
Price for Subscribers

$30,000
(per 5 x 5 mm2 design)

Note: List pricing is in US funds and does not include engineering support. Contact fab@cmc.ca for a quote.

Notes:

  1. Discounted pricing is available to academics in Canada with a CMC Subscription. You must sign in to see it.
  2. VIE clients are eligible to receive a discount. Contact sales@cmc.ca for assistance.
  3. Larger or smaller chip sizes can be accommodated in the run by sending a special request to fab@cmc.ca.

Licensing

Contact licensing@cmc.ca.

Minimum Access Requirement

For Canadian Academics

Does your research benefit from products and services provided by CMC Microsystems?

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