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VTT Aluminum Junction Process


This process allows for fabrication of coplanar structures on a high-resistivity silicon substrate, like resonators with quality factors of about one million. Aluminum junctions (Manhattan style) fabricated via electron-beam lithography can be used to make transmon qubits.

CMC offers this process as part of a multi-project wafer (MPW) service.

  • Al-AlOx-Al junctions with normal-state resistance ranging from 4k to 15 kOhm
  • High-resistivity silicon substrate
  • Nb wiring layer


  • Josephson junctions
  • SQUIDs
  • Resonators
  • Qubits
  • Low-temperature electronics


  • Design kits
  • Design-rule checking services
  • CMC engineering support


  • Nb resonators with Q-factor of approximately one million
  • Aluminum junctions


List Price
Price for Subscribers

(per 5 x 5 mm2 design)

Note: List pricing is in US funds and does not include engineering support. Contact fab@cmc.ca for a quote.


  1. Discounted pricing is available to academics in Canada with a CMC Subscription. You must sign in to see it.
  2. VIE clients are eligible to receive a discount. Contact sales@cmc.ca for assistance.
  3. Larger or smaller chip sizes can be accommodated in the run by sending a special request to fab@cmc.ca.


Contact licensing@cmc.ca.

Minimum Access Requirement

For Canadian Academics

Does your research benefit from products and services provided by CMC Microsystems?

The CMC SponsorChip program helps companies enhance their research efforts and links to academic researchers.

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