Passive Silicon Photonics Fabrication Workshop 2023

Online, live November 8 to 22, 2023

CMC and its SiEPIC partner professors are offering this legendary Silicon Photonics Fabrication Workshop online.

This workshop trains students in the design, fabrication, and test of photonic integrated circuits (PICs) targeting the ANT NanoSOI Technology.

SiemensLumerical (now part of the ANSYS family)Luceda, and Applied NanoTools are supporting this course by providing access arrangements to their tools.

Important Notes

  1.  To obtain access to certain confidential technology information provided during the course and required for fabrication, your organization is required to either have active ANT Non-Disclosure Agreements (NDAs) in place or to sign new Non-Disclosure Agreements prior to the start of the course and before your enrollment can be confirmed. Please contact Jessica Zhang (zhang@cmc.ca) to facilitate the NDA execution process prior to November 1, 2023.
  2. Workshop participants will have access to other proprietary and confidential information during the course. Each participant is required to sign an Access to Intellectual Property & Non-Disclosure Agreement. Participants should submit a signed agreement to Sarah Neville (Neville@cmc.ca) prior to November 1, 2023.


Completion of an undergraduate program in electrical engineering or applied physics.


Before classAt your own schedulePre-recorded video lectures, tutorials, and activities
November 8 to 22, 202312:00 pm to 3:00 pm ESTVideo Conference call via Zoom, the link will be provided before class.


The training includes 30-hour lectures, three-month licenses to CAD/simulation tools (see Note), chip fabrication areas on ANT fabrication runs aggregated by CMC, one-year access to the pre-recorded materials, plus CMC engineering support until tape-outs.

Students from Canadian Universities can earn 3 credits by registering and completing the graduate courses offered by:

  • Laval GEL7070 or GEL7071
  • UBC ELEC 582

Note: Siemens license imposes access restrictions on non-academic participants. Ansys Lumerical license may impose access restrictions on non-Canadian participants. Contact Jessica Zhang at zhang@cmc.ca for updates.


  • Students: $800
  • Subscribers: $1000
  • Academic: $3000
  • General: $4000

The registration deadline is November 7, 2023.

Training Schedule

  • Online pre-recorded video lectures, tutorials, and activities (self-paced, after registration is confirmed)
  • Online Passive workshop: November 8 to 22, 2023
  • Design, modelling, and mask layout: November 2023 to February 2024
    • Access to software tools, tutorials, and online discussion forums
    • Design feedback will be provided
  • ANT fabrication signup deadline: January 2024
  • ANT tape-out design submission deadline: February 2024
  • Device testing result: April 2024
  • Student report: May 2024

Technology Description

ANT Technology

  • Silicon-on-insulator, 220-nm top Si film, 2000-nm buried oxide (BOX)
  • Electron beam lithography, enabling features down to 60 nm
  • Supports:
    • waveguides (strip)
    • gratings for fibre coupling
    • metal heaters for thermo-optic phase shifting
    • deep trench and nano-tapers for edge coupling
    • multiplexers, filters, ring and disk resonators
  • Fabrication is carried out by Applied Nanotools in Canada
  • Other capabilities, such as edge couplers, oxide window openings and thermal isolation trenches are available outside of the course through Applied Nanotools.

Course Details

Instruction Syllabus Summary

  • Photonics passive device theory and modelling.
  • Fabrication processes and design kits
  • Lumerical MODE Solutions, FDTD Solutions, INTERCONNECT
  • Layout & verification
    • CAD tools: K-layout, Siemens Tanner and Calibre
  • Design for test (DFT) and design for fabrication (DFF)

Access to Tools

  • Siemens – Siemens offers workshop attendees from academic institutions no-cost access to Tanner and Calibre licenses during the workshop and following the workshop, for the purpose of completing their course designs. License access for industrial participants will be reviewed by Siemens (Mentor) on a case-by-case basis.
  • ANSYS Lumerical – Lumerical offers workshop attendees no-cost access to Lumerical workshop licenses during the workshop and following the workshop for the purpose of completing their course designs. Participants who are located outside of Canada may be self-licensed to the Ansys Lumerical tools.
  • IPKISS and IPKISS AWG Designer from Luceda Photonics – Luceda offers workshop attendees no-cost access evaluation licenses for 30 days starting from the workshop.


If you have any comments or questions regarding the course content or registration, please contact Jessica Zhang.


Event cancellations must be received in writing at least one (1) week before the beginning date of the course in question to receive a full refund of the registration fee. A cancellation made after the deadline will not receive a refund.

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