MEMS Pro is now included in the Siemens HEP. 

SoftMEMs MEMS Pro is a flexible, powerful, and easy-to-use CAD tool suite for the design and analysis of micro-electro-mechanical systems (MEMS). It offers an integrated solution for the design process that shortens development time while providing designers with reliable analysis for manufacture.

MEMS Pro, in combination with other 3D analysis programs, enables system designers, MEMS circuit designers, IC designers, process engineers, MEMS specialists, and packaging engineers to share critical design and process information in the most relevant way for each contributor.

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