VTT

This process allows for fabrication of coplanar structures on a high-resistivity silicon substrate, like resonators with quality factors of about one million. Aluminum junctions patterned by electron beam lithography can be added on top to make complete qubits CMC offers this process as part of a multi-project wafer (MPW) service. Al-ALOx-Al junctions in a range […]

This two-layer process allows for the fabrication of Niobium side-wall passivated junctions via an Nb-Al-AlOx-Nb tri-layer, alongside an Nb wiring layer on top.  CMC offers this process as part of a multi-project wafer (MPW) service. Nb-Al-ALOx-Nb trilayer junctions  High-resistivity silicon substrate Nb wiring layer on top The process provides 20 copies of the designs. Applications